Keysight (Agilent) Technologies B1500A Semiconductor Parametric Analyzers

KEYSIGHT (AGILENT) TECHNOLOGIES B1500A

Semiconductor Device Analyzer Mainframe

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B1500A PRODUCT OVERVIEW  
 

Description

Summary

The Agilent B1500A Semiconductor Device Analyzer is a modular instrument with a ten-slot configuration that supports both IV and CV measurements and also fast high-voltage pulsing. Its familiar, Microsoft ® Windows ® user interface supports Agilent’s EasyEXPERT software, which provides a new, more intuitive task-oriented approach to device characterization. Because of its extremely low-current, low-voltage, and integrated capacitance measurement capabilities, the Agilent B1500A can be used for a wide range of semiconductor device characterization needs (IC-CAP supports the B1500A). It is also an excellent solution for non-volatile memory cell characterization and high-speed device characterization (including advanced NBTI and RTS noise (RTN) measurement).

Application topic: Agilent Pulsed IV parametric test solution

Latest module: B1530A Waveform Generator / Fast Measurement Unit

Features and Benefits

  • Superior IV measurement performance: 0.1 fA / 0.5 µV measurement resolution
  • Measurement features include single and multi-channel sweep, time sampling, list sweep, quasi-static CV (using the SMUs), direct control and arbitrary linear waveform generation (ALWG) GUI for the HV-SPGUs.
  • Optional, integrated capacitance module supports CV measurements up to 5 MHz
  • Optional positioner-based CV-IV switching solutions available with 0.5 µV voltage measurement resolution and 10 fA, 1 fA or 0.1 fA current measurement resolution capability
  • Easy test automation with built-in semiautomatic wafer prober drivers and test sequencing without programming via the Quick Test mode
  • Optional high-voltage semiconductor pulse generator unit (HV-SPGU) available with 10 ns programmable pulse widths and /- 40 V (80 V peak-to-peak) output.
  • Optional waveform generator/fast measurement unit (WGFMU) available with ALWG and fast current or voltage measurement capabilities.
  • 10 ns pulsed IV solution is available for characterizing high-k gate dielectric and SOI (silicon-on-insulator) transistors.
  • A Classic Test mode is available to provide the look, feel, and terminology of the 4155/4156 interface while enhancing user interaction by taking full advantage of Microsoft ® Windows ® GUI features

Module Selection Guide

Please view Data Sheet for details of available modules.

Module Required Slot Main Specification
B1510A HPSMU 2 Up to 200V, 1A force. 10fA current resolution
B1511A MPSMU 1 Up to 100V, 100mA force, 10fA current resolution
B1517A HRSMU 1 Up to 100V, 100mA force, 1fA current resolution
E5288A ASU NA Up to 100V, 100mA force, 100aA current resolution
B1520A MFCMU 1 1kHz to 5MHz, up to 100V DC bias with SMU
B1525A HV-SPGU 1 Min 12.5ns pulse width, 10ns transition time, up to 40V with 3 level pulse
B1530A WGFMU  1 Min 100ns pulse width, 10V peak-to-peak output, 5ns current or voltage measurement sampling speed   

Microsoft and Windows are U.S. registered trademarks of Microsoft Corp.



Key Specification

General features

  • PC-based instrument with Windows®XP Professional OS and EasyEXPERT software
  • Single-box solution for current-voltage (IV), capacitance-voltage (CV), pulse generation, fast IV, and time-domain measurement.
  • Ten module slots for source monitor units (SMUs) and other module types (MFCMU, HV-SPGU and WGFMU)
  • Offline data analysis and application test development via Desktop EasyEXPERT software

Measurement capabilities

  • Supports current-voltage (IV) measurement to 0.1fA and 0.5µV
  • Supports both quasi-static and medium-frequency capacitance-voltage (CV) measurement
  • Supports accurate fast IV and time-domain measurement for a wide range of applications such as pulsed IV, NBTI and RTS noise (RTN) measurement.
  • Supports high voltage pulse generation (up to ±40 V) for high power and memory device testing.

Keysight (Agilent) Technologies B1500 Series Semiconductor Device Analyzers Products

B1500A - Semiconductor Device Analyzer Mainframe
B1500A OPTIONS (71)
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B1500A-015 1.5m cable length (for mainframe bundled cables and for package options)
B1500A-030 3m cable length (for mainframe bundled cables and for package options)
B1500A-050 50Hz Line Frequency
B1500A-060 60Hz Line Frequency
B1500A-0B0 Download the Product Manual from the Keysight website
B1500A-1CM Rack Mount Kit for B1500 Series
B1500A-281 Atto Sense and Switch Unit for High Resolution Source Monitor Unit w/ 1.5m cable
B1500A-282 Atto Sense and Switch Unit for High Resolution Source Monitor Unit w/ 3.0m cable
B1500A-283 Atto Sense and Switch Unit for Medium Power Source Monitor Unit w/ 1.5m cable
B1500A-284 Atto Sense and Switch Unit for Medium Power Source Monitor Unit w/ 3.0m cable
B1500A-A00 Standard Pack 0 - Empty Package for Custom Solution (No module is included.)
B1500A-A01 Standard Pack 1 -Standard Package (Mid PWR unit 4ea, Cables)
B1500A-A02 Standard Pack 2 -High Resolution Package (High Resolution unit 4ea, Cables)
B1500A-A03 Standard Pack 3 -High Power Package(High PWR unit 2ea, Mid PWR unit 2ea, Cables)
B1500A-A04 Standard Pack 4 - Flash Pack(Mid PWR unit 2ea, Hi-Res unit 2ea, PG, Accessories)
B1500A-A10 Add-on Package - High Power Source Monitor Unit (B1510A) 1ea, Cables
B1500A-A11 Add-on Package - Mid Power Source Monitor Unit (B1511B) 1ea, Cables
B1500A-A17 Add-on Package - High Resolution Source Monitor Unit (B1517A) 1ea, Cables
B1500A-A1A Add-on Package - B1514A Medium current source/monitor unit 1ea w/ connection box
B1500A-A1B Add-on Package - B1514A Medium current source/monitor unit 2ea w/ connection box
B1500A-A20 Add-on Package - Capacitance Measurement Unit (B1520A) 1ea, Cable 1ea
B1500A-A25 Add-on Package - Pulse Generator Unit (B1525A) 1ea, Cables
B1500A-A28 Add-on Package - Atto Sense Unit 1ea for High Resolution Source Monitor Unit
B1500A-A29 Add-on Package - Atto Sense Unit 1ea, for Mid Power Source Monitor Unit (B1511B)
B1500A-A30 Add-on Package - B1530A 1ea, Remote Sense Unit 2ea, Cables
B1500A-A31 Add-on Package - B1530A 1ea, Connector Adaptor, Remote Sense Unit 2ea, Cables
B1500A-A3P Add-on Package - Probe cable kit for B1530A(8 probe cables. B1530A not included)
B1500A-A5F Add-on Pack - Test Fixture for packaged device (16442B 1ea)
B1500A-A6J ANSI Z540-1-1994 Calibration
B1500A-ABA English Documentation
B1500A-ABJ Japanese Documentation
B1500A-DR1 Replace a built-in DVD-R drive with a read-only DVD drive
B1500A-RMKT Keysight Refurbished Product
B1500A-UK6 Commercial calibration certificate with test data
B1510A-FG High Power Source/Monitor Unit Module for B1500
B1511A-FG Medium Power Source/Monitor Unit Module (B1511A)
B1511B-FG Medium Power Source/Monitor Unit Module (B1511B)
B1514A-FG Medium Current Source Monitor Unit
B1520A-FG Multi Frequency Capacitance Measurement Unit Module for B1500
B1525A-FG High Voltage Semiconductor Pulse Generator Unit Module for B1500
B1530A-001 0.6m/2.4m Cable set between WGFMU and RSU(2ea). Require prober I/F with adapter.
B1530A-002 3m Cable between WGFMU and RSU (2ea)
B1530A-003 5m Cable between WGFMU and RSU (2ea)
B1530A-004 0.6m/4.4m Cable set between WGFMU and RSU(2ea). Require prober I/F with adapter.
B1530A-005 1.5m Cable between WGFMU and RSU (2ea)
B1530A-0KN Self-paced Sample Program Learning Kit for B1530A WGFMU
B1540A-001 EasyEXPERT Software on B1500A with License To Use for Standard version
E3332C-900 Power Cord - United Kingdom
E3332C-901 Power Cord - Australia and New Zealand
E3332C-902 Power Cord - Continental Europe
E3332C-903 Power Cord - United States and Canada (120V)
E3332C-904 Power Cord - United States and Canada (240V)
E3332C-906 Power Cord - Switzerland
E3332C-912 Power Cord - Denmark
E3332C-917 Power Cord - India
E3332C-918 Power Cord - Japan
E3332C-919 Power Cord - Israel
E3332C-920 Power Cord - Argentina
E3332C-921 Power Cord - Chile
E3332C-922 Power Cord - China
E3332C-923 Power Cord - South Africa
E3332C-927 Power Cord - Thailand
E3332C-930 Power Cord - Brazil
E3332C-931 Power Cord - Taiwan
E3332C-932 Power Cord - Cambodia
E5288A-001 Triax and Dsub Cable for ASU (1.5M)
E5288A-002 Triax and Dsub Cable for ASU (3M)
PS-S20-01 Recommended Startup assistance
R-50C-011-3 Calibration Assurance Plan - Return to Keysight - 3 years
R-50C-011-5 Calibration Assurance Plan - Return to Keysight - 5 years
R-51B-001-5Z Warranty Assurance Plan - Return to Keysight - 5 years
B1500A RESOURCES LIBRARY  
 
B1500A DOCUMENTS
B1500A PRODUCT Q & A  
 
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