Keysight (Agilent) Technologies E5270B Semiconductor Parametric Analyzers


Precision IV Analyzer / 8 Slot Precision Measurement Mainframe

8 Slot Precision Measurement Mainframe :CD-ROM Man
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The E5270B offers a flexible, expandable, and upgradeable solution for parametric characterization of semiconductor devices, with voltage measurement resolution down to 0.5 microvolts and current measurement resolution down to 0.1 femtoamps. Three different source/monitor unit (SMU) types are available to meet a variety of parametric measurement challenges: a medium power SMU (MPSMU), a high power SMU (HPSMU), and a high resolution SMU (HRSMU). An optional atto-sense and switch unit (ASU) works with the HRSMU to provide 100 attoamps of current measurement resolution. The ASU enables switching between SMU-based measurement (IV) and capacitance meter based measurement (CV) without having to change any cables. Agilent also provides an industry-standard VXIplug&play instrument driver as a cost-effective programming aid when using your own testing software, as well as test instruction set (TIS) commands that are compatible with 4070 Series test algorithms.

Basic and simple IV measurement can be made with the version 4.0 or later of Desktop EasyEXPERT. Available functions are limited. The latest Desktop EasyEXPERT is downloadable from "Related Product" under "Option & Accessories" with free of charge.

Industry Challenges

Engineers and scientists working on current and future semiconductor process technologies face a variety of parametric measurement challenges:

  • Reducing the cost of test. Flexible and expandable solutions are needed to allow for solution customization and to ensure that measurement hardware does not become obsolete.
  • Precise ultra low current and low voltage measurement. Certain structures require current measurement resolution < 1 femtoamp and/or voltage measurement resolution < 1 microvolt.
  • Easy capacitance versus voltage (CV) and current versus voltage measurement (IV). Both CV and IV measurement are required for semiconductor device characterization, but switching between these is difficult (especially when using positioners on a wafer prober).


Solves the most extreme parametric measurement challenges

For engineers and scientists working on current and future semiconductor process technologies, the E5270B provides a solution that both meets their needs and lowers their cost of test. The wide variety of available modules and advanced measurement features provide a complete solution for parametric measurement and analysis. Both a VXIplug&play driver and TIS commands are provided as programming aids for customers who choose to use their own software instead of software provided by Agilent.

Unlike solutions that include both the system controller and measurement resources combined, the E5270B gives you the freedom to manage these resources separately, thereby avoiding the expensive problem of the system controller becoming obsolete years before other elements. The E5270B can be controlled from MS Windows-based, UNIX-based, or even LINUX-based operating system environments. Because you can upgrade your system controller hardware or software without losing the use of your instrument, your investment is protected against unforeseeable technology shifts.

  • Ultra low current measurement without cumbersome external preamplifiers
    The E5270B HRSMU supplies 1-femtoamp measurement resolution without the need for cumbersome external preamplifiers, providing an extremely efficient solution for situations not requiring ultra low current measurement. This innate capability enables you to meet the measurement challenges posed by the vast majority of current and future devices. The HRSMU (and redesigned MPSMU) also provides voltage measurement resolution down to 0.5 microvolts. The HRSMU (as well as the redesigned MPSMU) also supports new 0.5 V and 5 V measurement ranges, which improve measurement accuracy for modern lower-voltage transistors. Advanced measurement features include multi-channel sweep mode with parallel test capability, linear/binary search, range management, and force value self-monitoring.
  • Flexibility to provide stable 100 attoamp measurements
    The HRSMU accepts an optional atto sense and switch unit (ASU), which increases the low current measurement resolution to 100 attoamps. This is invaluable for certain extreme characterization needs such as memory cell leakage testing. In addition, the ASU allows you to make voltage measurements and force both voltage and current up to the limits of the HRSMU specification.
  • Switch between CV and IV measurement without wasting time swapping cables
    The ASU enables switching between 100 attoamp measurement and precise capacitance measurement without changing any cabling. The ASU includes two BNC inputs that are compatible with the outputs of a capacitance meter. Simple software commands enable you to switch between SMU based measurement (IV) and capacitance meter based measurement (CV) without having to change any cabling. You can also use the BNC inputs with other instruments such as a digital voltmeter (DVM) or a pulse generator unit (PGU). No matter what your configuration, the ASU provides better switching measurement performance than an external switching matrix, and offers improved ease of use.
  • Cost-effective alternative that takes advantage of your own testing software
    Agilent provides an industry-standard VXIplug&play driver, a high-level programming interface that saves time by allowing your programmers to avoid having to learn the detailed programming of the instrument. In addition, the TIS -- test instruction set -- interface enables code developed for the lab environment to be used in production. Specifically, TIS allows you to write algorithms for subsequent transfer to the Agilent 4070 production test environment.

Features and Benefits

Feature Benefit
No embedded controller in the instrument Manage your instrument measurement resources separately from your controller and software resources, einsuring that your test investment does not become obsolete too quickly.
HRSMU has 1 femtoamp current measurement resolution Can meet the measurement challenges posed by the vast majority of current and future devices, without the need for external preamplifiers.
HRSMU combines with optional atto sense and switch unit (ASU) to achieve 100 attoamp current measurement resolution Stable 100 attoamp current resolution via remote sensing meets the most demanding ultra low currenU)
  • E5288A Atto Sense and Switch Unit (ASU)
  • Cables and accessories
  • Manual CD-ROM
  • Software CD-ROM (including VXIplug&play driver and E5270B TIS library
  • Key Specifications

    Mainframe Characteristics
      E5270B 8-Slot Precision Measurement Mainframe
    Available Slots 8
    Ground Unit (GNDU) Sink Capability 4.0 A
    Instrument Control GPIB
    External Trigger Inputs/Outputs 1 BNC Trigger In; 1 BNC Trigger Out; 8 Programmable Trigger In/Out
    Module Selection Guide
      E5280B HPSMU E5281B MPSMU E5287A HRSMU E5288A ASU
    Required Slots 2 1 1 N/A
    Maximum force voltage ± 200 V ± 100 V ± 100 V ± 100 V
    Maximum force current ± 1 A ± 100 mA ± 100 mA ± 100 mA
    Voltage measurement resolution 2 µV 0.5 µV 0.5 µV 0.5 µV
    Current measurement resolution 10 fA 10 fA 1 fA 0.1 fA

    Related Agilent Offerings

    • 4155C Semiconductor Parameter Analyzer
    • 4156C Precision Semiconductor Parameter Analyzer
    • E5250A Low-leakage Switch Mainframe
    • B2200A fA Leakage Switch Mainframe
    • B2201A 14ch Low Leakage Switch Mainframe
    • 41000 Series

    Key Specification

    General features

    • Perform precision dc parametric measurements
    • Eight slots for plug-in modules
    • Code compatible with 4142B
    • Basic and simple IV measurement via Desktop EasyEXPERT

    Measurement capabilities

    • 0.5 microvolt and 0.1 femtoamp measurement resolution (HRSMU ASU)
    • /- 100 Volts and /- 100 milliamp output capability (MPSMU, HRSMU)
    • /- 200 Volts and /- 1 Amp output capability (HPSMU)
    • 4 Amp ground unit

    E5270B OPTIONS (40)
    E3332C-900 Power Cord - United Kingdom
    E3332C-901 Power Cord - Australia and New Zealand
    E3332C-902 Power Cord - Continental Europe
    E3332C-903 Power Cord - United States and Canada (120V)
    E3332C-904 Power Cord - United States and Canada (240V)
    E3332C-906 Power Cord - Switzerland
    E3332C-912 Power Cord - Denmark
    E3332C-917 Power Cord - India
    E3332C-918 Power Cord - Japan
    E3332C-919 Power Cord - Israel
    E3332C-920 Power Cord - Argentina
    E3332C-921 Power Cord - Chile
    E3332C-922 Power Cord - China
    E3332C-923 Power Cord - South Africa
    E3332C-927 Power Cord - Thailand
    E3332C-930 Power Cord - Brazil
    E3332C-931 Power Cord - Taiwan
    E3332C-932 Power Cord - Cambodia
    E5270B-015 1.5m Cable Length (for bundled cables and for package options)
    E5270B-030 3.0m Cable Length (for bundled cables and for package options)
    E5270B-050 50Hz Line Frequency
    E5270B-060 60Hz Line Frequency
    E5270B-0B0 Download the Product Manual from the Keysight website
    E5270B-1CM Rack Mount Kit for E5270B
    E5270B-A01 Mid Power Source/Monitor Unit (4ea), Cables
    E5270B-A02 Mid power Source/Monitor unit (2ea), High Resolution Unit (2ea), Cables
    E5270B-A03 High Resolution Source/Monitor Unit (4ea), Cables
    E5270B-A10 Add High Power Source/Monitor Unit (E5280B) 1ea, Cables
    E5270B-A11 Add Mid Power Source/Monitor Unit (E5281B) 1ea, Cables
    E5270B-A17 Add High Resolution Source/Monitor Unit (E5287A) 1ea, Cables
    E5270B-A28 Add Atto Sense and Switch Unit (E5288A ASU) 1ea
    E5270B-A6J ANSI Z540-1-1994 Calibration
    E5270B-ABA Printed Manuals (English)
    E5270B-ABJ Printed Manuals (Japanese)
    E5270B-DLA Delete Accessories Bundled for Analyzer Use
    E5270B-RMKT Keysight Refurbished Product
    E5270B-UK6 Commercial calibration certificate with test data
    R-50C-011-3 Calibration Assurance Plan - Return to Keysight - 3 years
    R-50C-011-5 Calibration Assurance Plan - Return to Keysight - 5 years
    R-51B-001-5Z Warranty Assurance Plan - Return to Keysight - 5 years
    E5270B PRODUCT Q & A  
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